Features
Low O2 & H2O Contents
H2O＜1ppm、O2＜1ppm
Low Leakage Rate
<0.001vol%/h
High Cleanroom
ISO-2, ISO-3(class 1)
Specifications
VP-60 & VP-100 & VP-20
| VP-60 | VP-100 | VP-200 | |
| Parameters | |||
| Working Space（m³ ） | 25 | 50 | 100 |
| Blower（m³/h） | ＞500 | ＞1000 | ＞2000 |
| O₂（ppm） | <1 | <1 | <1 |
| H₂O （ppm） | <1 | <1 | <1 |
| Adsorption Content O₂（l） | 600 | 1500 | 3000 |
| Adsorption Content H₂O（g） | 18000 | 50000 | 100000 |
| Sensor | |||
| O₂ ppm | ● | ● | ● |
| O₂% | ● | ● | ● |
| H₂O ppm | ● | ● | ● |
| Pressure Sensor | ● | ● | ● |
| Solvent Sensor | ○ | ○ | ○ |
| Features | |||
| Leakage Rate Detection | ● | ● | ● |
| Curve Chart H₂O/O₂ ppm | ● | ● | ● |
| Curve Chart (Box Pressure) | ● | ● | ● |
| Automatic Regeneration | ● | ● | ● |
| Color Touch Screen | ● | ● | ● |
| Dry Vacuum Pump | ● | ● | ● |
NAVIGATION
5718 Westheimer Rd, Suite 1000, Houston, TX 77057, USA
